Template:Microtechnology

Basic structures

Applications

Sensors	Microbolometer
Actuators	Comb drive Scratch drive actuator Thermal actuator
Switches	Digital micromirror device Optical switch
Other	Millipede memory Radio-frequency microelectromechanical systems Microoptoelectromechanical systems Microphotonics Biological microelectromechanical systems Microfluidics Micropower

Processes

General	Surface micromachining Bulk micromachining HAR micromachining Deposition Lithography Etching Wire bonding
Specific	LOCOS Shallow trench isolation LIGA Lift-off Photolithography Silicon on insulator Smart cut