| Industry | Illumination Semiconductors Rapid thermal anneal Nuclear flash simulation |
|---|---|
| Founded | 1976 |
| Fate | acquired by Mattson Technology Rolls-Royce plc |
| Successor | Mattson Technology (2004) |
| Headquarters | Vancouver British Columbia Canada |
[Business Week] [IEEE] [IEEE] Axcelis Technologies
Acquired by Mattson technologies October 2004. [1]