Journal of Micro/Nanopatterning, Materials, and Metrology is a peer-reviewed scientific journal published quarterly by SPIE. It covers science, development, and practice of micro and nanofabrication processes and metrology.[1] Established in 2002 under the name Journal of Microlithography, Microfabrication, and Microsystems, it was subsequently retitled to Journal of Micro/Nanolithography, MEMS, and MOEMS in 2007. The journal title was changed to its current name in 2021.[2]
| Discipline | Microlithography, nanolithography, metrology |
|---|---|
| Language | English |
| Edited by | Harry Levinson |
| Publication details | |
Former name(s) |
|
| History | 2002–present |
| Publisher | |
| Frequency | Quarterly |
| 2.3 (2022) | |
| Standard abbreviations | |
| ISO 4 | J. Micro/Nanopatterning Mater. Metrol. |
| Indexing | |
| CODEN | JMMMIH |
| ISSN | 1932-5150 (print) 2708-8340 (web) |
| OCLC no. | 1249108189 |
| Links | |
The editor-in-chief of the journal is Harry Levinson (HJL Lithography).[1]
Abstracting and indexing
editThe journal is abstracted and indexed in:
- Current Contents/Electronics & Telecommunications Collection[3]
- Current Contents/Engineering, Computing & Technology[3]
- Current Contents/Physical, Chemical & Earth Sciences[3]
- EBSCO databases[4]
- Ei Compendex[5]
- Inspec[6]
- Science Citation Index Expanded[3]
- Scopus[7]
According to the Journal Citation Reports, the journal has a 2022 impact factor of 2.3.[8]
References
edit- ^ a b "Journal of Micro/Nanopatterning, Materials, and Metrology". SPIE. Retrieved May 22, 2024.
- ^ Journal of Micro/Nanopatterning, Materials, and Metrology (JMMMIH; 2708-8340) – via CASSI
- ^ a b c d "Web of Science Master Journal List". Intellectual Property & Science. Clarivate. Retrieved May 22, 2024.
- ^ "Journal of Micro/Nanopatterning, Materials, and Metrology". MIAR: Information Matrix for the Analysis of Journals. University of Barcelona. Retrieved May 22, 2024.
- ^ "Content/Database Overview - Compendex Source List". Engineering Village. Elsevier. Retrieved May 22, 2024.
- ^ "Inspec list of journals" (PDF). Inspec. Institution of Engineering and Technology. Archived from the original (PDF) on May 5, 2022. Retrieved May 22, 2024.
- ^ "Journal of Micro/Nanopatterning, Materials, and Metrology". Scopus Preview. Elsevier. Retrieved May 22, 2024.
- ^ "Journal of Micro/Nanopatterning, Materials, and Metrology". 2022 Journal Citation Reports (Science ed.). Clarivate. 2023 – via Web of Science.