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First_mems_device.jpg (434 × 366 pixels, file size: 116 KB, MIME type: image/jpeg)
Summary edit
| Description |
Figure of first MEMS device from U.S. patent 3413573 |
|---|---|
| Source | |
| Date |
1968-11-26 |
| Author |
H.C. Nathanson et al |
| Permission (Reusing this file) |
See below.
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Licensing edit
 | The text and illustrations of US patents are in the public domain in the United States unless the patent text contains a specific notice that portions are copyrighted.[1][2][3]
The original patent contains no such notice, so its contents are in the public domain in the United States. |
 | This file is a candidate to be copied to Wikimedia Commons.
Any user may perform this transfer; refer to Wikipedia:Moving files to Commons for details. If this file has problems with attribution, copyright, or is otherwise ineligible for Commons, then remove this tag and DO NOT transfer it; repeat violators may be blocked from editing. Other Instructions
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File history
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 20:31, 25 December 2010 | | 434 × 366 (116 KB) | MarcMedia (talk | contribs) | Different format |
| 20:25, 25 December 2010 |  | 434 × 366 (183 KB) | MarcMedia (talk | contribs) | Thumbnail was not created during original upload | |
| 20:15, 25 December 2010 |  | 434 × 366 (183 KB) | MarcMedia (talk | contribs) | {{Information |Description = Figure of first MEMS device from U.S. patent 3413573 |Source = U.S. Patent Office |Date = 1968-11-26 |Author = H.C. Nathanson et al }} |
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