Wikipedia

File:Extreme ultraviolet lithography tool.jpg

Original file ‎(713 × 605 pixels, file size: 80 KB, MIME type: image/jpeg)

Description
English: EUVL tool, that deposits virtually defect-free, ultra-thin films on integrated circuits.
Date
Source Laser Programs, the first 25 years, 1972-1997, available from osti.gov.
Author Lawrence Livermore National Laboratory
Permission
(Reusing this file)
Public domain This image is a work of a United States Department of Energy (or predecessor organization) employee, taken or made as part of that person's official duties. As a work of the U.S. federal government, the image is in the public domain.

Please note that national laboratories operate under varying licences and some are not free. Check the site policies of any national lab before crediting it with this tag.

العربية ∙ English ∙ français ∙ 日本語 ∙ македонски ∙ മലയാളം ∙ Nederlands ∙ русский ∙ українська ∙ Tiếng Việt ∙ 简体中文 ∙ 繁體中文 ∙ +/−

Captions

Add a one-line explanation of what this file represents

Items portrayed in this file

depicts

inception

4 March 1998

File history

Click on a date/time to view the file as it appeared at that time.

Date/TimeThumbnailDimensionsUserComment
current18:19, 22 September 2011Thumbnail for version as of 18:19, 22 September 2011713 × 605 (80 KB)Bomazi{{Information |Description ={{en|1=EUVL tool, that deposits virtually defect-free, ultra-thin films on integrated circuits.}} |Source =''Laser Programs, the first 25 years, 1972-1997'', available from [http://www.osti.gov/bridge/product.biblio.
The following pages on the English Wikipedia use this file (pages on other projects are not listed):

Global file usage

The following other wikis use this file:

Metadata

This file contains additional information, probably added from the digital camera or scanner used to create or digitize it.

If the file has been modified from its original state, some details may not fully reflect the modified file.

Retrieved from "https://en.wikipedia.org/wiki/File:Extreme_ultraviolet_lithography_tool.jpg"