The EUV SMO performance based on normalized image log-slope (NILS) optimization for 32 nm pitch logic metal layout and through-pitch structures is only successful for 34-38 nm pitch (NILS = 2.0-2.15), while not satisfactory for other pitches, even though the target was 32 nm. Ref.: R-H. Kim et al., Proc. SPIE 9771, 97716R (2016).
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